Semiconductor Manufacturing
Industry
Wafer Batch Split Tool
Manual wafer batch split tool
3 months
Timeline
precise, reliable wafer batch transfer
Result
Project Overview
We designed and manufactured a carrier batch transfer tool that allows manual wafer transfer from a 25-piece 12" SEMI E47.1 FOUP to two 13-piece carriers and vice versa. The 25 wafers are split into a 12-piece and a 13-piece batch. The system features constant-force springs for smooth weight compensation and controlled lifting, enabling one-handed operation. The tool ensures flexible, safe, and efficient wafer transfer with minimal operator effort.
Technologies Used
Constant-force springs
ESD-safe materials
Precision mechanical design
Key Outcomes
Precise, reliable wafer batch transfer
Enabled one-handed operation
Flexible bidirectional transfer
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